Characterisation of multi-element (Nb, Cr) N thin films deposited by unbalanced magnetron sputtering

• المؤلف الرئيسي: Tan, Jen Ngee.
• مؤلفون آخرون: Hsieh, Joe Jang-Hsing
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/6460

Tool steels have long been used to manufacture tools for high speed cutting and machining due to its excellent strength, toughness, and heat resistance. However, though the excellent mechanical properties, the tool surface and near surface regions are subjected to the most destructive forces, for ex...