Characterisation of multi-element (Nb, Cr) N thin films deposited by unbalanced magnetron sputtering

• 主要作者: Tan, Jen Ngee.
• 其他作者: Hsieh, Joe Jang-Hsing
• 格式: Theses and Dissertations
• 出版: 2008
• 主題: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• 在線閱讀: http://hdl.handle.net/10356/6460
• 機構: Nanyang Technological University

Tool steels have long been used to manufacture tools for high speed cutting and machining due to its excellent strength, toughness, and heat resistance. However, though the excellent mechanical properties, the tool surface and near surface regions are subjected to the most destructive forces, for ex...