Synthesis of boron doped continuous diamond film by microwave assisted plasma enhanced chemical vapour deposition
Diamond has many attractive properties such as high hardness, good durability and excellence heat conductivity. The diamond synthesis technique has become a popular topic to research because of diamond`s rareness and useful. Plasma enhances chemical vapour deposition (PECVD) is one of the popular me...
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Main Author: | Wang, Shancheng |
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Other Authors: | Christian Leo Kloc |
Format: | Final Year Project |
Language: | English |
Published: |
2016
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Subjects: | |
Online Access: | http://hdl.handle.net/10356/67303 |
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Institution: | Nanyang Technological University |
Language: | English |
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