Processing and characterization of shape memory alloy thin films for micro-grippers with multi-degree-of freedom and other applications
In the present project, the magnetron sputtering technique was used to fabricate NiTi-base SMA thin films. The project began with fabrication of the SMA thin films through exploring various deposition parameters. In order to obtain thin films with shape memory effect and good mechanical properties,...
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| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Research Report |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/6970 |
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| Institution: | Nanyang Technological University |
| Summary: | In the present project, the magnetron sputtering technique was used to fabricate NiTi-base SMA thin films. The project began with fabrication of the SMA thin films through exploring various deposition parameters. In order to obtain thin films with shape memory effect and good mechanical properties, composition control and microstructure control are the two most important issues. After successfully fabricated the thin films with shape memory effect, various factors that may affect the performance of the thin films were systematically investigated. Further, SMA-based micro-grippers were developed and tested. |
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