Processing and characterization of shape memory alloy thin films for micro-grippers with multi-degree-of freedom and other applications

• Main Authors: Liu, Yong, Huang, Weimin, Liu, Erjia, Chollet, Franck
• Other Authors: School of Mechanical and Production Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering
• Online Access: http://hdl.handle.net/10356/6970
• Institution: Nanyang Technological University

In the present project, the magnetron sputtering technique was used to fabricate NiTi-base SMA thin films. The project began with fabrication of the SMA thin films through exploring various deposition parameters. In order to obtain thin films with shape memory effect and good mechanical properties,...