Processing and characterization of shape memory alloy thin films for micro-grippers with multi-degree-of freedom and other applications

Processing and characterization of shape memory alloy thin films for micro-grippers with multi-degree-of freedom and other applications

In the present project, the magnetron sputtering technique was used to fabricate NiTi-base SMA thin films. The project began with fabrication of the SMA thin films through exploring various deposition parameters. In order to obtain thin films with shape memory effect and good mechanical properties,...

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Main Authors: Liu, Yong, Huang, Weimin, Liu, Erjia, Chollet, Franck
Other Authors: School of Mechanical and Production Engineering
Format: Research Report
Published: 2008
Subjects:
DRNTU::Engineering
Online Access:http://hdl.handle.net/10356/6970
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Institution: Nanyang Technological University
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spelling sg-ntu-dr.10356-69702020-06-01T10:44:39Z Processing and characterization of shape memory alloy thin films for micro-grippers with multi-degree-of freedom and other applications Liu, Yong Huang, Weimin Liu, Erjia Chollet, Franck School of Mechanical and Production Engineering DRNTU::Engineering In the present project, the magnetron sputtering technique was used to fabricate NiTi-base SMA thin films. The project began with fabrication of the SMA thin films through exploring various deposition parameters. In order to obtain thin films with shape memory effect and good mechanical properties, composition control and microstructure control are the two most important issues. After successfully fabricated the thin films with shape memory effect, various factors that may affect the performance of the thin films were systematically investigated. Further, SMA-based micro-grippers were developed and tested. 2008-09-17T14:38:22Z 2008-09-17T14:38:22Z 2004 2004 Research Report http://hdl.handle.net/10356/6970 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
topic DRNTU::Engineering
spellingShingle DRNTU::Engineering
Liu, Yong
Huang, Weimin
Liu, Erjia
Chollet, Franck
Processing and characterization of shape memory alloy thin films for micro-grippers with multi-degree-of freedom and other applications
description In the present project, the magnetron sputtering technique was used to fabricate NiTi-base SMA thin films. The project began with fabrication of the SMA thin films through exploring various deposition parameters. In order to obtain thin films with shape memory effect and good mechanical properties, composition control and microstructure control are the two most important issues. After successfully fabricated the thin films with shape memory effect, various factors that may affect the performance of the thin films were systematically investigated. Further, SMA-based micro-grippers were developed and tested.
author2 School of Mechanical and Production Engineering
author_facet School of Mechanical and Production Engineering
Liu, Yong
Huang, Weimin
Liu, Erjia
Chollet, Franck
format Research Report
author Liu, Yong
Huang, Weimin
Liu, Erjia
Chollet, Franck
author_sort Liu, Yong
title Processing and characterization of shape memory alloy thin films for micro-grippers with multi-degree-of freedom and other applications
title_short Processing and characterization of shape memory alloy thin films for micro-grippers with multi-degree-of freedom and other applications
title_full Processing and characterization of shape memory alloy thin films for micro-grippers with multi-degree-of freedom and other applications
title_fullStr Processing and characterization of shape memory alloy thin films for micro-grippers with multi-degree-of freedom and other applications
title_full_unstemmed Processing and characterization of shape memory alloy thin films for micro-grippers with multi-degree-of freedom and other applications
title_sort processing and characterization of shape memory alloy thin films for micro-grippers with multi-degree-of freedom and other applications
publishDate 2008
url http://hdl.handle.net/10356/6970
_version_ 1681058799753887744

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