Mid-infrared sensor based on a suspended microracetrack resonator with lateral subwavelength-grating metamaterial cladding

• Main Authors: Mohamed Said Rouifed, Liu, Chongyang, Sia, Jiaxu, Zhou, Jin, Littlejohns, Callum George, Reed, Graham T., Wang, Hong, Zhang, Zecen, Ng, Geok Ing, Hu, Ting, Qiu, Haodong, Guo, Xin, Wang, Wanjun
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2019
• Subjects: Silicon Nanophotonics; Waveguide Devices; DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/86052; http://hdl.handle.net/10220/48287
• Institution: Nanyang Technological University

A mid-infrared (MIR) biochemical sensor based on a one-time Si etching suspended microracetrack resonator with lateral subwavelength-grating metamaterial cladding is theoretically and experimentally demonstrated on a commercial 340-nm-thick-top-silicon silicon-on-insulator platform. The suspended st...