Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning

An interferogram obtained from a transparent plate contains information on the profiles of both surfaces and on the thickness variation. The present work is devoted to the processing of interferograms of this type. The processing technique is based on a 36-step algorithm developed by the authors for...

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Main Authors: Sun, Tao, Zheng, Weiwei, Yu, Yingjie, Yan, Ketao, Asundi, Anand, Valukh, Sergiy
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2019
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Online Access:https://hdl.handle.net/10356/87608
http://hdl.handle.net/10220/49298
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-876082023-03-04T17:16:22Z Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning Sun, Tao Zheng, Weiwei Yu, Yingjie Yan, Ketao Asundi, Anand Valukh, Sergiy School of Mechanical and Aerospace Engineering Wavelength Tuning Fizeau Interferometry Engineering::Mechanical engineering An interferogram obtained from a transparent plate contains information on the profiles of both surfaces and on the thickness variation. The present work is devoted to the processing of interferograms of this type. The processing technique is based on a 36-step algorithm developed by the authors for characterization of transparent plates having approximately equal reflections from both sides. The algorithm utilizes weighted multi-step phase shifting that enables one not only separately to extract the front and rear surface profiles together with the thickness variation of the tested plate but also to suppress the coupling errors between the higher harmonics and phase-shift deviation. The proposed measuring method was studied on a wavelength tunable Fizeau interferometer. The tested sample had an optical thickness and surface profile deviations equal to 0.51 µm, 1.38 µm and 0.89 µm, respectively. According to the results obtained using 10 repeated measurements, the root mean square (RMS) errors for determining both surface profiles did not exceed 1.5 nm. Experimental results show that the setup and presented 36-step algorithm are suitable for the measurement of a transparent plate of arbitrary thickness. Published version 2019-07-11T08:03:49Z 2019-12-06T16:45:33Z 2019-07-11T08:03:49Z 2019-12-06T16:45:33Z 2019 Journal Article Sun, T., Zheng, W., Yu, Y., Yan, K., Asundi, A., & Valukh, S. (2019). Algorithm for Surfaces Profiles and Thickness Variation Measurement of a Transparent Plate Using a Fizeau Interferometer with Wavelength Tuning. Applied Sciences, 9(11), 2349-. doi:10.3390/app9112349 2076-3417 https://hdl.handle.net/10356/87608 http://hdl.handle.net/10220/49298 10.3390/app9112349 en Applied Sciences © 2019 by the Authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). 14 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic Wavelength Tuning
Fizeau Interferometry
Engineering::Mechanical engineering
spellingShingle Wavelength Tuning
Fizeau Interferometry
Engineering::Mechanical engineering
Sun, Tao
Zheng, Weiwei
Yu, Yingjie
Yan, Ketao
Asundi, Anand
Valukh, Sergiy
Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning
description An interferogram obtained from a transparent plate contains information on the profiles of both surfaces and on the thickness variation. The present work is devoted to the processing of interferograms of this type. The processing technique is based on a 36-step algorithm developed by the authors for characterization of transparent plates having approximately equal reflections from both sides. The algorithm utilizes weighted multi-step phase shifting that enables one not only separately to extract the front and rear surface profiles together with the thickness variation of the tested plate but also to suppress the coupling errors between the higher harmonics and phase-shift deviation. The proposed measuring method was studied on a wavelength tunable Fizeau interferometer. The tested sample had an optical thickness and surface profile deviations equal to 0.51 µm, 1.38 µm and 0.89 µm, respectively. According to the results obtained using 10 repeated measurements, the root mean square (RMS) errors for determining both surface profiles did not exceed 1.5 nm. Experimental results show that the setup and presented 36-step algorithm are suitable for the measurement of a transparent plate of arbitrary thickness.
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Sun, Tao
Zheng, Weiwei
Yu, Yingjie
Yan, Ketao
Asundi, Anand
Valukh, Sergiy
format Article
author Sun, Tao
Zheng, Weiwei
Yu, Yingjie
Yan, Ketao
Asundi, Anand
Valukh, Sergiy
author_sort Sun, Tao
title Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning
title_short Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning
title_full Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning
title_fullStr Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning
title_full_unstemmed Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning
title_sort algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning
publishDate 2019
url https://hdl.handle.net/10356/87608
http://hdl.handle.net/10220/49298
_version_ 1759856344249139200