Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning

An interferogram obtained from a transparent plate contains information on the profiles of both surfaces and on the thickness variation. The present work is devoted to the processing of interferograms of this type. The processing technique is based on a 36-step algorithm developed by the authors for...

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Bibliographic Details
Main Authors: Sun, Tao, Zheng, Weiwei, Yu, Yingjie, Yan, Ketao, Asundi, Anand, Valukh, Sergiy
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2019
Subjects:
Online Access:https://hdl.handle.net/10356/87608
http://hdl.handle.net/10220/49298
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Institution: Nanyang Technological University
Language: English

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