Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning

• Main Authors: Sun, Tao, Zheng, Weiwei, Yu, Yingjie, Yan, Ketao, Asundi, Anand, Valukh, Sergiy
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2019
• Subjects: Wavelength Tuning; Fizeau Interferometry; Engineering::Mechanical engineering
• Online Access: https://hdl.handle.net/10356/87608; http://hdl.handle.net/10220/49298
• Institution: Nanyang Technological University

An interferogram obtained from a transparent plate contains information on the profiles of both surfaces and on the thickness variation. The present work is devoted to the processing of interferograms of this type. The processing technique is based on a 36-step algorithm developed by the authors for...