In-line digital holography for dynamic metrology of MEMS

In-line digital holography helps to relax the spatial resolution requirement on charge-coupled device sensors for digital recording of holograms and to utilize the full sensing area for image reconstruction which provides larger field of view and better imaging resolution. In this letter, a lensless...

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Main Authors: Singh, Vijay Raj, Anand, Asundi
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2011
Subjects:
Online Access:https://hdl.handle.net/10356/93818
http://hdl.handle.net/10220/6758
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-938182023-03-04T17:15:11Z In-line digital holography for dynamic metrology of MEMS Singh, Vijay Raj Anand, Asundi School of Mechanical and Aerospace Engineering DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics In-line digital holography helps to relax the spatial resolution requirement on charge-coupled device sensors for digital recording of holograms and to utilize the full sensing area for image reconstruction which provides larger field of view and better imaging resolution. In this letter, a lensless in-line digital holographic microscopy is presented for dynamic metrology of micro-electro-mechanical systems devices. The methodologies of interferometry and time-averaged in-line digital holography are presented for dynamic measurements, which are also useful for simultaneous suppression of in-line waves from real image wave. The experimental results are presented for dynamic thermal characterization of microheater and vibration analysis of cantilevers. Published version 2011-03-08T08:27:29Z 2019-12-06T18:46:03Z 2011-03-08T08:27:29Z 2019-12-06T18:46:03Z 2009 2009 Journal Article Singh, V. R., & Anand, A. (2009). In-line digital holography for dynamic metrology of MEMS. Chinese Optics Letters, 7(12), 1117-1122. 1671-7694 https://hdl.handle.net/10356/93818 http://hdl.handle.net/10220/6758 10.3788/COL20090712.1117 143338 en Chinese optics letters 6 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Singh, Vijay Raj
Anand, Asundi
In-line digital holography for dynamic metrology of MEMS
description In-line digital holography helps to relax the spatial resolution requirement on charge-coupled device sensors for digital recording of holograms and to utilize the full sensing area for image reconstruction which provides larger field of view and better imaging resolution. In this letter, a lensless in-line digital holographic microscopy is presented for dynamic metrology of micro-electro-mechanical systems devices. The methodologies of interferometry and time-averaged in-line digital holography are presented for dynamic measurements, which are also useful for simultaneous suppression of in-line waves from real image wave. The experimental results are presented for dynamic thermal characterization of microheater and vibration analysis of cantilevers.
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Singh, Vijay Raj
Anand, Asundi
format Article
author Singh, Vijay Raj
Anand, Asundi
author_sort Singh, Vijay Raj
title In-line digital holography for dynamic metrology of MEMS
title_short In-line digital holography for dynamic metrology of MEMS
title_full In-line digital holography for dynamic metrology of MEMS
title_fullStr In-line digital holography for dynamic metrology of MEMS
title_full_unstemmed In-line digital holography for dynamic metrology of MEMS
title_sort in-line digital holography for dynamic metrology of mems
publishDate 2011
url https://hdl.handle.net/10356/93818
http://hdl.handle.net/10220/6758
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