In-line digital holography for dynamic metrology of MEMS

• Main Authors: Singh, Vijay Raj, Anand, Asundi
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• Online Access: https://hdl.handle.net/10356/93818; http://hdl.handle.net/10220/6758
• Institution: Nanyang Technological University

In-line digital holography helps to relax the spatial resolution requirement on charge-coupled device sensors for digital recording of holograms and to utilize the full sensing area for image reconstruction which provides larger field of view and better imaging resolution. In this letter, a lensless...