In-line digital holography for dynamic metrology of MEMS

• Main Authors: Singh, Vijay Raj, Anand, Asundi
• 其他作者: School of Mechanical and Aerospace Engineering
• 格式: Article
• 語言: English
• 出版: 2011
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• 在線閱讀: https://hdl.handle.net/10356/93818; http://hdl.handle.net/10220/6758

In-line digital holography helps to relax the spatial resolution requirement on charge-coupled device sensors for digital recording of holograms and to utilize the full sensing area for image reconstruction which provides larger field of view and better imaging resolution. In this letter, a lensless...