MEMS-micropumps : a review

Microfluidics has emerged from the MEMS-technology as an important research field and a promising market. This paper gives an overview on one of the most important microfluidic components: the micropump. In the last decade, various micropumps have been developed. There are only a few review papers o...

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Bibliographic Details
Main Authors: Huang, Xiaoyang, Chuan, Toh Kok, Nguyen, Nam-Trung
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2012
Subjects:
Online Access:https://hdl.handle.net/10356/93856
http://hdl.handle.net/10220/7806
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Institution: Nanyang Technological University
Language: English
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Summary:Microfluidics has emerged from the MEMS-technology as an important research field and a promising market. This paper gives an overview on one of the most important microfluidic components: the micropump. In the last decade, various micropumps have been developed. There are only a few review papers on microfluidic devices and none of them were dedicated only to micropumps. This review paper outlines systematically the pump principles and their realization with MEMS-technology. Comparisons regarding pump size, flow rate, and backpressure will help readers to decide their proper design before starting a microfluidics project. Different pump principles are compared graphically and discussed in terms of their advantages and disadvantages for particular applications.