MEMS-micropumps : a review

• Main Authors: Huang, Xiaoyang, Chuan, Toh Kok, Nguyen, Nam-Trung
• 其他作者: School of Mechanical and Aerospace Engineering
• 格式: Article
• 語言: English
• 出版: 2012
• 主題: DRNTU::Engineering::Mechanical engineering
• 在線閱讀: https://hdl.handle.net/10356/93856; http://hdl.handle.net/10220/7806

Microfluidics has emerged from the MEMS-technology as an important research field and a promising market. This paper gives an overview on one of the most important microfluidic components: the micropump. In the last decade, various micropumps have been developed. There are only a few review papers o...