MEMS-micropumps : a review

• Main Authors: Huang, Xiaoyang, Chuan, Toh Kok, Nguyen, Nam-Trung
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: https://hdl.handle.net/10356/93856; http://hdl.handle.net/10220/7806
• Institution: Nanyang Technological University

Microfluidics has emerged from the MEMS-technology as an important research field and a promising market. This paper gives an overview on one of the most important microfluidic components: the micropump. In the last decade, various micropumps have been developed. There are only a few review papers o...