Preparation and characterization of ZnO microcantilever for nanoactuation

• Main Authors: Wang, Peihong, Du, Hejun, Shen, Shengnan, Zhang, Mingsheng, Liu, Bo
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Mechanical engineering::Assistive technology
• Online Access: https://hdl.handle.net/10356/94920; http://hdl.handle.net/10220/9343
• Institution: Nanyang Technological University

Zinc oxide [ZnO] thin films are deposited using a radiofrequency magnetron sputtering method under room temperature. Its crystalline quality, surface morphology, and composition purity are characterized by X-ray diffraction [XRD], atomic force microscopy [AFM], field-emission scanning electron micro...