Effect of residual stresses in injection molded cyclic olefin copolymer during microfabrication : hot embossing as well as thermal bonding
Microfabrication using replication techniques such as hot embossing and injection molding followed by thermal sealing with a cover plate have been widely used in the large scale manufacturing of polymer based micro-devices for bio and chemical-MEMS (Micro Electro Mechanical Systems) applications. Wh...
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| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2013
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| Online Access: | https://hdl.handle.net/10356/97196 http://hdl.handle.net/10220/10594 |
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| Institution: | Nanyang Technological University |
| Language: | English |