Nanohole structure as efficient antireflection layer for silicon solar cell fabricated by maskless laser annealing

• Main Authors: Hong, Lei, Rusli, Wang, Fei, He, Lining, Wang, Xincai, Zheng, Hongyu, Wang, Hao, Yu, Hongyu
• Other Authors: School of Electrical and Electronic Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/97345; http://hdl.handle.net/10220/13165
• Institution: Nanyang Technological University

In this paper, a uniform nanohole structure on silicon wafer is fabricated using the silver catalyst induced method. The optical properties of the silicon nanohole structure are studied systematically at different nanohole depths. The nanohole arrays demonstrate excellent antireflection property due...