Elimination of 'bottom pinching' effect in environmentally stable chemically amplified resist

10.1117/12.308790

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Bibliographic Details
Main Authors: Soo, C.P., Fan, M.H., Bourdillon, A.J., Chan, L.
Other Authors: MATERIALS SCIENCE
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/107271
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Institution: National University of Singapore
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Summary:10.1117/12.308790