Elimination of 'bottom pinching' effect in environmentally stable chemically amplified resist
10.1117/12.308790
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2014
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sg-nus-scholar.10635-1072712023-10-29T21:28:58Z Elimination of 'bottom pinching' effect in environmentally stable chemically amplified resist Soo, C.P. Fan, M.H. Bourdillon, A.J. Chan, L. MATERIALS SCIENCE 10.1117/12.308790 Proceedings of SPIE - The International Society for Optical Engineering 3332 727-734 PSISD 2014-10-29T08:41:57Z 2014-10-29T08:41:57Z 1998 Conference Paper Soo, C.P., Fan, M.H., Bourdillon, A.J., Chan, L. (1998). Elimination of 'bottom pinching' effect in environmentally stable chemically amplified resist. Proceedings of SPIE - The International Society for Optical Engineering 3332 : 727-734. ScholarBank@NUS Repository. https://doi.org/10.1117/12.308790 0277786X http://scholarbank.nus.edu.sg/handle/10635/107271 000075068300073 Scopus |
| institution |
National University of Singapore |
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NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1117/12.308790 |
| author2 |
MATERIALS SCIENCE |
| author_facet |
MATERIALS SCIENCE Soo, C.P. Fan, M.H. Bourdillon, A.J. Chan, L. |
| format |
Conference or Workshop Item |
| author |
Soo, C.P. Fan, M.H. Bourdillon, A.J. Chan, L. |
| spellingShingle |
Soo, C.P. Fan, M.H. Bourdillon, A.J. Chan, L. Elimination of 'bottom pinching' effect in environmentally stable chemically amplified resist |
| author_sort |
Soo, C.P. |
| title |
Elimination of 'bottom pinching' effect in environmentally stable chemically amplified resist |
| title_short |
Elimination of 'bottom pinching' effect in environmentally stable chemically amplified resist |
| title_full |
Elimination of 'bottom pinching' effect in environmentally stable chemically amplified resist |
| title_fullStr |
Elimination of 'bottom pinching' effect in environmentally stable chemically amplified resist |
| title_full_unstemmed |
Elimination of 'bottom pinching' effect in environmentally stable chemically amplified resist |
| title_sort |
elimination of 'bottom pinching' effect in environmentally stable chemically amplified resist |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/107271 |
| _version_ |
1781788368276815872 |