The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation

10.1016/S0039-6028(03)00466-7

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Main Authors: Price, R.W., Tok, E.S., Woods, N.J., Zhang, J.
Other Authors: MATERIALS SCIENCE
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/107318
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-1073182024-11-15T07:05:00Z The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation Price, R.W. Tok, E.S. Woods, N.J. Zhang, J. MATERIALS SCIENCE Adsorption kinetics Carbon Germanium Molecular beam epitaxy Reflection high-energy electron diffraction (RHEED) Silicon Thermal desorption spectroscopy 10.1016/S0039-6028(03)00466-7 Surface Science 532-535 905-910 SUSCA 2014-10-29T08:42:34Z 2014-10-29T08:42:34Z 2003-06-10 Conference Paper Price, R.W., Tok, E.S., Woods, N.J., Zhang, J. (2003-06-10). The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation. Surface Science 532-535 : 905-910. ScholarBank@NUS Repository. https://doi.org/10.1016/S0039-6028(03)00466-7 00396028 http://scholarbank.nus.edu.sg/handle/10635/107318 000183705900156 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Adsorption kinetics
Carbon
Germanium
Molecular beam epitaxy
Reflection high-energy electron diffraction (RHEED)
Silicon
Thermal desorption spectroscopy
spellingShingle Adsorption kinetics
Carbon
Germanium
Molecular beam epitaxy
Reflection high-energy electron diffraction (RHEED)
Silicon
Thermal desorption spectroscopy
Price, R.W.
Tok, E.S.
Woods, N.J.
Zhang, J.
The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation
description 10.1016/S0039-6028(03)00466-7
author2 MATERIALS SCIENCE
author_facet MATERIALS SCIENCE
Price, R.W.
Tok, E.S.
Woods, N.J.
Zhang, J.
format Conference or Workshop Item
author Price, R.W.
Tok, E.S.
Woods, N.J.
Zhang, J.
author_sort Price, R.W.
title The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation
title_short The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation
title_full The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation
title_fullStr The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation
title_full_unstemmed The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation
title_sort effects of carbon incorporation during gsmbe of si1-ycy and si1-x-ygexcy: growth dynamics and segregation
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/107318
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