The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation
10.1016/S0039-6028(03)00466-7
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2014
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sg-nus-scholar.10635-1073182024-11-15T07:05:00Z The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation Price, R.W. Tok, E.S. Woods, N.J. Zhang, J. MATERIALS SCIENCE Adsorption kinetics Carbon Germanium Molecular beam epitaxy Reflection high-energy electron diffraction (RHEED) Silicon Thermal desorption spectroscopy 10.1016/S0039-6028(03)00466-7 Surface Science 532-535 905-910 SUSCA 2014-10-29T08:42:34Z 2014-10-29T08:42:34Z 2003-06-10 Conference Paper Price, R.W., Tok, E.S., Woods, N.J., Zhang, J. (2003-06-10). The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation. Surface Science 532-535 : 905-910. ScholarBank@NUS Repository. https://doi.org/10.1016/S0039-6028(03)00466-7 00396028 http://scholarbank.nus.edu.sg/handle/10635/107318 000183705900156 Scopus |
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Adsorption kinetics Carbon Germanium Molecular beam epitaxy Reflection high-energy electron diffraction (RHEED) Silicon Thermal desorption spectroscopy |
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Adsorption kinetics Carbon Germanium Molecular beam epitaxy Reflection high-energy electron diffraction (RHEED) Silicon Thermal desorption spectroscopy Price, R.W. Tok, E.S. Woods, N.J. Zhang, J. The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation |
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10.1016/S0039-6028(03)00466-7 |
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MATERIALS SCIENCE |
author_facet |
MATERIALS SCIENCE Price, R.W. Tok, E.S. Woods, N.J. Zhang, J. |
format |
Conference or Workshop Item |
author |
Price, R.W. Tok, E.S. Woods, N.J. Zhang, J. |
author_sort |
Price, R.W. |
title |
The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation |
title_short |
The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation |
title_full |
The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation |
title_fullStr |
The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation |
title_full_unstemmed |
The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation |
title_sort |
effects of carbon incorporation during gsmbe of si1-ycy and si1-x-ygexcy: growth dynamics and segregation |
publishDate |
2014 |
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http://scholarbank.nus.edu.sg/handle/10635/107318 |
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1821196884169981952 |