The effects of carbon incorporation during GSMBE of Si1-yCy and Si1-x-yGexCy: Growth dynamics and segregation

• Main Authors: Price, R.W., Tok, E.S., Woods, N.J., Zhang, J.
• Other Authors: MATERIALS SCIENCE
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Adsorption kinetics; Carbon; Germanium; Molecular beam epitaxy; Reflection high-energy electron diffraction (RHEED); Silicon; Thermal desorption spectroscopy
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/107318
• Institution: National University of Singapore

10.1016/S0039-6028(03)00466-7