Proton beam writing: A platform technology for nano-integration

Proton beam writing: A platform technology for nano-integration

10.1117/12.772607

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Bibliographic Details
Main Authors: Van Kan, J.A., Zhang, F., Bettiol, A.A., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Direct write
High aspect ratio
Nanolithography
Nanowires
Proton beam writing
Online Access:http://scholarbank.nus.edu.sg/handle/10635/112669
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Institution: National University of Singapore
id sg-nus-scholar.10635-112669
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spelling sg-nus-scholar.10635-1126692023-10-31T20:10:58Z Proton beam writing: A platform technology for nano-integration Van Kan, J.A. Zhang, F. Bettiol, A.A. Watt, F. PHYSICS NUS NANOSCIENCE & NANOTECH INITIATIVE Direct write High aspect ratio Nanolithography Nanowires Proton beam writing 10.1117/12.772607 Proceedings of SPIE - The International Society for Optical Engineering 6921 - PSISD 2014-11-28T06:34:09Z 2014-11-28T06:34:09Z 2008 Conference Paper Van Kan, J.A., Zhang, F., Bettiol, A.A., Watt, F. (2008). Proton beam writing: A platform technology for nano-integration. Proceedings of SPIE - The International Society for Optical Engineering 6921 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.772607 9780819471062 0277786X http://scholarbank.nus.edu.sg/handle/10635/112669 000256898400015 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Direct write
High aspect ratio
Nanolithography
Nanowires
Proton beam writing
spellingShingle Direct write
High aspect ratio
Nanolithography
Nanowires
Proton beam writing
Van Kan, J.A.
Zhang, F.
Bettiol, A.A.
Watt, F.
Proton beam writing: A platform technology for nano-integration
description 10.1117/12.772607
author2 PHYSICS
author_facet PHYSICS
Van Kan, J.A.
Zhang, F.
Bettiol, A.A.
Watt, F.
format Conference or Workshop Item
author Van Kan, J.A.
Zhang, F.
Bettiol, A.A.
Watt, F.
author_sort Van Kan, J.A.
title Proton beam writing: A platform technology for nano-integration
title_short Proton beam writing: A platform technology for nano-integration
title_full Proton beam writing: A platform technology for nano-integration
title_fullStr Proton beam writing: A platform technology for nano-integration
title_full_unstemmed Proton beam writing: A platform technology for nano-integration
title_sort proton beam writing: a platform technology for nano-integration
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/112669
_version_ 1781789114299842560

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