Proton beam writing: A platform technology for nano-integration

• Main Authors: Van Kan, J.A., Zhang, F., Bettiol, A.A., Watt, F.
• Other Authors: PHYSICS
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Direct write; High aspect ratio; Nanolithography; Nanowires; Proton beam writing
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/112669
• Institution: National University of Singapore

10.1117/12.772607