Proton beam writing: A platform technology for nano-integration

Proton beam writing: A platform technology for nano-integration

10.1117/12.772607

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Bibliographic Details
Main Authors:	Van Kan, J.A., Zhang, F., Bettiol, A.A., Watt, F.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Direct write High aspect ratio Nanolithography Nanowires Proton beam writing
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/112669
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

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