Surface roughening effect in sub-keV SIMS depth profiling

Surface roughening effect in sub-keV SIMS depth profiling

10.1016/S0169-4332(02)00638-4

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Bibliographic Details
Main Authors: Liu, R., Ng, C.M., Wee, A.T.S.
Other Authors: INSTITUTE OF ENGINEERING SCIENCE
Format: Conference or Workshop Item
Published: 2014
Subjects:
SIMS
Surface roughening
Online Access:http://scholarbank.nus.edu.sg/handle/10635/113119
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Institution: National University of Singapore
Description
Summary:10.1016/S0169-4332(02)00638-4

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