Surface roughening effect in sub-keV SIMS depth profiling

10.1016/S0169-4332(02)00638-4

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Bibliographic Details
Main Authors:	Liu, R., Ng, C.M., Wee, A.T.S.
Other Authors:	INSTITUTE OF ENGINEERING SCIENCE
Format:	Conference or Workshop Item
Published:	2014
Subjects:	SIMS Surface roughening
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113119
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Institution:	National University of Singapore

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