Surface roughening effect in sub-keV SIMS depth profiling
10.1016/S0169-4332(02)00638-4
Saved in:
| Main Authors: | , , |
|---|---|
| Other Authors: | |
| Format: | Conference or Workshop Item |
| Published: |
2014
|
| Subjects: | |
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/113119 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-113119 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-1131192023-10-27T07:52:40Z Surface roughening effect in sub-keV SIMS depth profiling Liu, R. Ng, C.M. Wee, A.T.S. INSTITUTE OF ENGINEERING SCIENCE PHYSICS SIMS Surface roughening 10.1016/S0169-4332(02)00638-4 Applied Surface Science 203-204 256-259 ASUSE 2014-11-28T09:12:15Z 2014-11-28T09:12:15Z 2003-01-15 Conference Paper Liu, R., Ng, C.M., Wee, A.T.S. (2003-01-15). Surface roughening effect in sub-keV SIMS depth profiling. Applied Surface Science 203-204 : 256-259. ScholarBank@NUS Repository. https://doi.org/10.1016/S0169-4332(02)00638-4 01694332 http://scholarbank.nus.edu.sg/handle/10635/113119 000180527300058 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
SIMS Surface roughening |
| spellingShingle |
SIMS Surface roughening Liu, R. Ng, C.M. Wee, A.T.S. Surface roughening effect in sub-keV SIMS depth profiling |
| description |
10.1016/S0169-4332(02)00638-4 |
| author2 |
INSTITUTE OF ENGINEERING SCIENCE |
| author_facet |
INSTITUTE OF ENGINEERING SCIENCE Liu, R. Ng, C.M. Wee, A.T.S. |
| format |
Conference or Workshop Item |
| author |
Liu, R. Ng, C.M. Wee, A.T.S. |
| author_sort |
Liu, R. |
| title |
Surface roughening effect in sub-keV SIMS depth profiling |
| title_short |
Surface roughening effect in sub-keV SIMS depth profiling |
| title_full |
Surface roughening effect in sub-keV SIMS depth profiling |
| title_fullStr |
Surface roughening effect in sub-keV SIMS depth profiling |
| title_full_unstemmed |
Surface roughening effect in sub-keV SIMS depth profiling |
| title_sort |
surface roughening effect in sub-kev sims depth profiling |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/113119 |
| _version_ |
1781789169575526400 |