XPS study of incident angle effects on the ion beam modification of InP surfaces by 6 keV O2 +

10.1002/(SICI)1096-9918(199911)27:113.0.CO;2-J

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Main Authors:	Pan, J.S., Tay, S.T., Huan, C.H.A., Wee, A.T.S.
Other Authors:	INST OF MATERIALS RESEARCH & ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113231
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-113231
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spelling	sg-nus-scholar.10635-1132312015-01-05T23:33:35Z XPS study of incident angle effects on the ion beam modification of InP surfaces by 6 keV O2 + Pan, J.S. Tay, S.T. Huan, C.H.A. Wee, A.T.S. INST OF MATERIALS RESEARCH & ENGINEERING PHYSICS 10.1002/(SICI)1096-9918(199911)27:113.0.CO;2-J Surface and Interface Analysis 27 11 993-997 SIAND 2014-11-30T06:41:13Z 2014-11-30T06:41:13Z 1999 Article Pan, J.S.,Tay, S.T.,Huan, C.H.A.,Wee, A.T.S. (1999). XPS study of incident angle effects on the ion beam modification of InP surfaces by 6 keV O2 +. Surface and Interface Analysis 27 (11) : 993-997. ScholarBank@NUS Repository. <a href="https://doi.org/10.1002/(SICI)1096-9918(199911)27:113.0.CO;2-J" target="_blank">https://doi.org/10.1002/(SICI)1096-9918(199911)27:113.0.CO;2-J</a> 01422421 http://scholarbank.nus.edu.sg/handle/10635/113231 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1002/(SICI)1096-9918(199911)27:113.0.CO;2-J
author2	INST OF MATERIALS RESEARCH & ENGINEERING
author_facet	INST OF MATERIALS RESEARCH & ENGINEERING Pan, J.S. Tay, S.T. Huan, C.H.A. Wee, A.T.S.
format	Article
author	Pan, J.S. Tay, S.T. Huan, C.H.A. Wee, A.T.S.
spellingShingle	Pan, J.S. Tay, S.T. Huan, C.H.A. Wee, A.T.S. XPS study of incident angle effects on the ion beam modification of InP surfaces by 6 keV O2 +
author_sort	Pan, J.S.
title	XPS study of incident angle effects on the ion beam modification of InP surfaces by 6 keV O2 +
title_short	XPS study of incident angle effects on the ion beam modification of InP surfaces by 6 keV O2 +
title_full	XPS study of incident angle effects on the ion beam modification of InP surfaces by 6 keV O2 +
title_fullStr	XPS study of incident angle effects on the ion beam modification of InP surfaces by 6 keV O2 +
title_full_unstemmed	XPS study of incident angle effects on the ion beam modification of InP surfaces by 6 keV O2 +
title_sort	xps study of incident angle effects on the ion beam modification of inp surfaces by 6 kev o2 +
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/113231
_version_	1681094620193226752

XPS study of incident angle effects on the ion beam modification of InP surfaces by 6 keV O2 +

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