XPS study of incident angle effects on the ion beam modification of InP surfaces by 6 keV O2 +
10.1002/(SICI)1096-9918(199911)27:113.0.CO;2-J
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Main Authors: | Pan, J.S., Tay, S.T., Huan, C.H.A., Wee, A.T.S. |
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Other Authors: | INST OF MATERIALS RESEARCH & ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/113231 |
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Institution: | National University of Singapore |
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