XPS study of incident angle effects on the ion beam modification of InP surfaces by 6 keV O2 +

10.1002/(SICI)1096-9918(199911)27:113.0.CO;2-J

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Bibliographic Details
Main Authors:	Pan, J.S., Tay, S.T., Huan, C.H.A., Wee, A.T.S.
Other Authors:	INST OF MATERIALS RESEARCH & ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113231
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Institution:	National University of Singapore

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