Stability of Al2O3 and Al2O3/a- SiNx:H stacks for surface passivation of crystalline silicon

10.1063/1.3264572

Saved in:

Bibliographic Details
Main Authors:	Dingemans, G., Engelhart, P., Seguin, R., Einsele, F., Hoex, B., Van De Sanden, M.C.M., Kessels, W.M.M.
Other Authors:	SOLAR ENERGY RESEARCH INST OF S'PORE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113251
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-113251
record_format	dspace
spelling	sg-nus-scholar.10635-1132512023-10-29T21:41:46Z Stability of Al2O3 and Al2O3/a- SiNx:H stacks for surface passivation of crystalline silicon Dingemans, G. Engelhart, P. Seguin, R. Einsele, F. Hoex, B. Van De Sanden, M.C.M. Kessels, W.M.M. SOLAR ENERGY RESEARCH INST OF S'PORE 10.1063/1.3264572 Journal of Applied Physics 106 11 - JAPIA 2014-11-30T06:41:24Z 2014-11-30T06:41:24Z 2009 Article Dingemans, G., Engelhart, P., Seguin, R., Einsele, F., Hoex, B., Van De Sanden, M.C.M., Kessels, W.M.M. (2009). Stability of Al2O3 and Al2O3/a- SiNx:H stacks for surface passivation of crystalline silicon. Journal of Applied Physics 106 (11) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3264572 00218979 http://scholarbank.nus.edu.sg/handle/10635/113251 000272838600155 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.3264572
author2	SOLAR ENERGY RESEARCH INST OF S'PORE
author_facet	SOLAR ENERGY RESEARCH INST OF S'PORE Dingemans, G. Engelhart, P. Seguin, R. Einsele, F. Hoex, B. Van De Sanden, M.C.M. Kessels, W.M.M.
format	Article
author	Dingemans, G. Engelhart, P. Seguin, R. Einsele, F. Hoex, B. Van De Sanden, M.C.M. Kessels, W.M.M.
spellingShingle	Dingemans, G. Engelhart, P. Seguin, R. Einsele, F. Hoex, B. Van De Sanden, M.C.M. Kessels, W.M.M. Stability of Al2O3 and Al2O3/a- SiNx:H stacks for surface passivation of crystalline silicon
author_sort	Dingemans, G.
title	Stability of Al2O3 and Al2O3/a- SiNx:H stacks for surface passivation of crystalline silicon
title_short	Stability of Al2O3 and Al2O3/a- SiNx:H stacks for surface passivation of crystalline silicon
title_full	Stability of Al2O3 and Al2O3/a- SiNx:H stacks for surface passivation of crystalline silicon
title_fullStr	Stability of Al2O3 and Al2O3/a- SiNx:H stacks for surface passivation of crystalline silicon
title_full_unstemmed	Stability of Al2O3 and Al2O3/a- SiNx:H stacks for surface passivation of crystalline silicon
title_sort	stability of al2o3 and al2o3/a- sinx:h stacks for surface passivation of crystalline silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/113251
_version_	1781789182273781760

Stability of Al2O3 and Al2O3/a- SiNx:H stacks for surface passivation of crystalline silicon

Similar Items