Effect of pressure on fluid damping in MEMS torsional resonators with flow ranging from continuum to molecular regime

• Main Authors: Pandey, A.K., Pratap, R., Chau, F.S.
• 其他作者: MECHANICAL ENGINEERING
• 格式: Article
• 出版: 2014
• 主題: Experimental result; MEMS; Microfluidics; Quality factor; Squeeze-film damping; Torsion motion
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/114498
• 機構: National University of Singapore

10.1007/s11340-007-9076-2