The 2nd generation proton beam writing
Ph.D
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2015
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/118575 |
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| Institution: | National University of Singapore |
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sg-nus-scholar.10635-1185752015-02-03T06:18:07Z The 2nd generation proton beam writing YAO YONG PHYSICS VAN KAN, JEROEN ANTON proton beam writing,high aspect ratio,lithography,resolution standard,automatic focusing, sub-10 nm Ph.D DOCTOR OF PHILOSOPHY 2015-01-31T18:00:29Z 2015-01-31T18:00:29Z 2014-08-18 Thesis YAO YONG (2014-08-18). The 2nd generation proton beam writing. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/118575 NOT_IN_WOS en |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| language |
English |
| topic |
proton beam writing,high aspect ratio,lithography,resolution standard,automatic focusing, sub-10 nm |
| spellingShingle |
proton beam writing,high aspect ratio,lithography,resolution standard,automatic focusing, sub-10 nm YAO YONG The 2nd generation proton beam writing |
| description |
Ph.D |
| author2 |
PHYSICS |
| author_facet |
PHYSICS YAO YONG |
| format |
Theses and Dissertations |
| author |
YAO YONG |
| author_sort |
YAO YONG |
| title |
The 2nd generation proton beam writing |
| title_short |
The 2nd generation proton beam writing |
| title_full |
The 2nd generation proton beam writing |
| title_fullStr |
The 2nd generation proton beam writing |
| title_full_unstemmed |
The 2nd generation proton beam writing |
| title_sort |
2nd generation proton beam writing |
| publishDate |
2015 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/118575 |
| _version_ |
1681095482803224576 |