The 2nd generation proton beam writing

The 2nd generation proton beam writing

Ph.D

Saved in:

Bibliographic Details
Main Author:	YAO YONG
Other Authors:	PHYSICS
Format:	Theses and Dissertations
Language:	English
Published:	2015
Subjects:	proton beam writing,high aspect ratio,lithography,resolution standard,automatic focusing, sub-10 nm
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/118575
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore
Language:	English

Similar Items

DEVELOPMENT AND OPTIMIZATION OF HIGH BRIGHTNESS NANO-APERTURE ION SOURCE FOR PROTON BEAM WRITING APPLICATIONS
by: XU XINXIN
Published: (2017)

Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing
by: Valamontes, E., et al.
Published: (2014)

Hydrogen silsesquioxane a next generation resist for proton beam writing at the 20 nm level
by: van Kan, J.A., et al.
Published: (2014)

New resists for proton beam writing
by: van Kan, J.A., et al.
Published: (2014)

Proton beam fabrication of nickel stamps for nanoimprint lithography
by: Ansari, K., et al.
Published: (2014)

Exposure parameters in proton beam writing for hydrogen silsesquioxane
by: van Kan, J.A., et al.
Published: (2014)

Proton beam writing: A platform technology for nano-integration
by: Van Kan, J.A., et al.
Published: (2014)

NANOFABRICATION USING OPTIMIZED PROTON BEAM WRITING AND MASKED ION LITHOGRAPHY
by: SARFRAZ QURESHI
Published: (2019)

High aspect ratio PDMS replication through proton beam fabricated Ni masters
by: van Kan, J.A., et al.
Published: (2014)

Fabrication of free standing resolution standards using proton beam writing
by: Zhang, F., et al.
Published: (2014)

Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures
by: Yue, W., et al.
Published: (2014)

An automatic beam focusing system for MeV protons
by: Udalagama, C.N.B., et al.
Published: (2014)

Proton beam writing: A progress review
by: Van Kan, J.A., et al.
Published: (2014)

Three-dimensional metamaterials fabricated using Proton Beam Writing
by: Bettiol, A.A., et al.
Published: (2014)

Proton beam writing applications in microfluidics and nanoimprint lithography
by: KAMBIZ ANSARI MAHABADI
Published: (2010)

Proton beam writing of long, arbitrary structures for micro/nano photonics and fluidics applications
by: Udalagama, C., et al.
Published: (2014)

Optimization and Computer Control of the Sub-100 nm, Proton Beam Writing Facility at CIBA
by: CHAMMIKA N B UDALAGAMA
Published: (2010)

Ion beam lithography and nanofabrication: A review
by: Watt, F., et al.
Published: (2014)

High aspect ratio micro/nano machining with proton beam writing on aqueous developable - easily stripped negative chemically-amplified resists
by: Chatzichristidi, M., et al.
Published: (2014)

Proton beam micromachined resolution standards for nuclear microprobes
by: Watt, F., et al.
Published: (2014)

Fabrication of metallic stamps for injection moulding applications by combining proton beam writing and UV lithography
by: Malar, P., et al.
Published: (2014)

Ionscan: Scanning and control software for proton beam writing
by: Bettiol, A.A., et al.
Published: (2014)

Nickel injection mould fabrication via proton beam writing and UV lithography
by: Nan, L.N., et al.
Published: (2014)

Adhesion of proton beam written high aspect ratio hydrogen silsesquioxane (HSQ) nanostructures on different metallic substrates
by: Gorelick, S., et al.
Published: (2014)

Proton beam written hydrogen silsesquioxane (HSQ) nanostructures for Nickel electroplating
by: Gorelick, S., et al.
Published: (2014)

Proton beam writing for producing holographic images
by: Ow, Y.S., et al.
Published: (2014)

Fabrication of a free standing resolution standard for focusing MeV ion beams to sub 30 nm dimensions
by: Van Kan, J.A., et al.
Published: (2014)

New developments in the applications of proton beam writing
by: Mistry, P., et al.
Published: (2014)

Proton beam micromachining: A new tool for precision three-dimensional microstructures
by: Van Kan, J.A., et al.
Published: (2014)

Enhancement of proton beam writing in PMMA through optimization of the development procedure
by: Bolhuis, S., et al.
Published: (2014)

High precision 3D metallic microstructures produced using proton beam micromachining
by: Van Kan, J.A., et al.
Published: (2014)

Proton or helium ion beam written channel waveguides in Nd:YAG ceramics
by: Yao, Y., et al.
Published: (2014)

Sidewall quality in proton beam writing
by: Chiam, S.Y., et al.
Published: (2014)

Embedded photonic structures fabricated in photosensitive glass using proton beam writing
by: Bettiol, A.A., et al.
Published: (2014)

Polymer microlens replication by Nanoimprint Lithography using proton beam fabricated Ni stamp
by: Dutta, R.K., et al.
Published: (2014)

Integrating photonic and microfluidic structures on a device fabricated using proton beam writing
by: Bettiol, A.A., et al.
Published: (2014)

Proton beam writing of passive waveguides in PMMA
by: Sum, T.C., et al.
Published: (2014)

A progress review of proton beam writing applications in microphotonics
by: Bettiol, A.A., et al.
Published: (2014)

Fabrication of nickel molds using proton beam writing for micro/nano fluidic devices
by: Liu, F., et al.
Published: (2014)

Fabrication of optical microresonators using proton beam writing
by: Kumar, V.S., et al.
Published: (2014)