Performance enhancement in Ge pMOSFETs with orientation fabricated with a Si-compatible process flow

10.1016/j.mee.2010.01.010

Saved in:

Bibliographic Details
Main Authors:	Dutta Gupta, S., Mitard, J., Eneman, G., De Jaeger, B., Meuris, M., Heyns, M.M.
Other Authors:	SOLAR ENERGY RESEARCH INST OF S'PORE
Format:	Article
Published:	2016
Subjects:	Channel-orientation Enhanced mobility Germanium (Ge) pFET devices
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/128740
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-128740
record_format	dspace
spelling	sg-nus-scholar.10635-1287402024-11-08T20:15:06Z Performance enhancement in Ge pMOSFETs with orientation fabricated with a Si-compatible process flow Dutta Gupta, S. Mitard, J. Eneman, G. De Jaeger, B. Meuris, M. Heyns, M.M. SOLAR ENERGY RESEARCH INST OF S'PORE Channel-orientation Enhanced mobility Germanium (Ge) pFET devices 10.1016/j.mee.2010.01.010 Microelectronic Engineering 87 11 2115-2118 MIENE 2016-10-19T08:44:38Z 2016-10-19T08:44:38Z 2010-11 Article Dutta Gupta, S., Mitard, J., Eneman, G., De Jaeger, B., Meuris, M., Heyns, M.M. (2010-11). Performance enhancement in Ge pMOSFETs with orientation fabricated with a Si-compatible process flow. Microelectronic Engineering 87 (11) : 2115-2118. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2010.01.010 01679317 http://scholarbank.nus.edu.sg/handle/10635/128740 000281420900018 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Channel-orientation Enhanced mobility Germanium (Ge) pFET devices
spellingShingle	Channel-orientation Enhanced mobility Germanium (Ge) pFET devices Dutta Gupta, S. Mitard, J. Eneman, G. De Jaeger, B. Meuris, M. Heyns, M.M. Performance enhancement in Ge pMOSFETs with orientation fabricated with a Si-compatible process flow
description	10.1016/j.mee.2010.01.010
author2	SOLAR ENERGY RESEARCH INST OF S'PORE
author_facet	SOLAR ENERGY RESEARCH INST OF S'PORE Dutta Gupta, S. Mitard, J. Eneman, G. De Jaeger, B. Meuris, M. Heyns, M.M.
format	Article
author	Dutta Gupta, S. Mitard, J. Eneman, G. De Jaeger, B. Meuris, M. Heyns, M.M.
author_sort	Dutta Gupta, S.
title	Performance enhancement in Ge pMOSFETs with orientation fabricated with a Si-compatible process flow
title_short	Performance enhancement in Ge pMOSFETs with orientation fabricated with a Si-compatible process flow
title_full	Performance enhancement in Ge pMOSFETs with orientation fabricated with a Si-compatible process flow
title_fullStr	Performance enhancement in Ge pMOSFETs with orientation fabricated with a Si-compatible process flow
title_full_unstemmed	Performance enhancement in Ge pMOSFETs with orientation fabricated with a Si-compatible process flow
title_sort	performance enhancement in ge pmosfets with orientation fabricated with a si-compatible process flow
publishDate	2016
url	http://scholarbank.nus.edu.sg/handle/10635/128740
_version_	1821202753745059840

Performance enhancement in Ge pMOSFETs with orientation fabricated with a Si-compatible process flow

Similar Items