Plasma charging damage in deep sub-micron CMOS devices

Master's

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Bibliographic Details
Main Author:	TEO WEI YEE, JOCELYN
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	MOS device, plasma charging damage, gate oxide, antenna, high density plasma, interconnect layer
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/13472
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-13472
record_format	dspace
spelling	sg-nus-scholar.10635-134722024-10-26T08:05:33Z Plasma charging damage in deep sub-micron CMOS devices TEO WEI YEE, JOCELYN ELECTRICAL & COMPUTER ENGINEERING LI MING-FU MOS device, plasma charging damage, gate oxide, antenna, high density plasma, interconnect layer Master's MASTER OF ENGINEERING 2010-04-08T10:33:19Z 2010-04-08T10:33:19Z 2003-10-27 Thesis TEO WEI YEE, JOCELYN (2003-10-27). Plasma charging damage in deep sub-micron CMOS devices. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/13472 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	MOS device, plasma charging damage, gate oxide, antenna, high density plasma, interconnect layer
spellingShingle	MOS device, plasma charging damage, gate oxide, antenna, high density plasma, interconnect layer TEO WEI YEE, JOCELYN Plasma charging damage in deep sub-micron CMOS devices
description	Master's
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING TEO WEI YEE, JOCELYN
format	Theses and Dissertations
author	TEO WEI YEE, JOCELYN
author_sort	TEO WEI YEE, JOCELYN
title	Plasma charging damage in deep sub-micron CMOS devices
title_short	Plasma charging damage in deep sub-micron CMOS devices
title_full	Plasma charging damage in deep sub-micron CMOS devices
title_fullStr	Plasma charging damage in deep sub-micron CMOS devices
title_full_unstemmed	Plasma charging damage in deep sub-micron CMOS devices
title_sort	plasma charging damage in deep sub-micron cmos devices
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/13472
_version_	1821222140754526208

Plasma charging damage in deep sub-micron CMOS devices

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