Metal gate with high-K dielectric in Si CMOS processing

Ph.D

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Main Author:	PARK CHANG SEO
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	metal gate, high-K, work function, integration, CMOS, FUSI
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/15210
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-15210
record_format	dspace
spelling	sg-nus-scholar.10635-152102017-10-21T09:58:53Z Metal gate with high-K dielectric in Si CMOS processing PARK CHANG SEO ELECTRICAL & COMPUTER ENGINEERING CHO BYUNG-JIN metal gate, high-K, work function, integration, CMOS, FUSI Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T10:51:08Z 2010-04-08T10:51:08Z 2006-04-24 Thesis PARK CHANG SEO (2006-04-24). Metal gate with high-K dielectric in Si CMOS processing. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/15210 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	metal gate, high-K, work function, integration, CMOS, FUSI
spellingShingle	metal gate, high-K, work function, integration, CMOS, FUSI PARK CHANG SEO Metal gate with high-K dielectric in Si CMOS processing
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING PARK CHANG SEO
format	Theses and Dissertations
author	PARK CHANG SEO
author_sort	PARK CHANG SEO
title	Metal gate with high-K dielectric in Si CMOS processing
title_short	Metal gate with high-K dielectric in Si CMOS processing
title_full	Metal gate with high-K dielectric in Si CMOS processing
title_fullStr	Metal gate with high-K dielectric in Si CMOS processing
title_full_unstemmed	Metal gate with high-K dielectric in Si CMOS processing
title_sort	metal gate with high-k dielectric in si cmos processing
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/15210
_version_	1681079156446593024

Metal gate with high-K dielectric in Si CMOS processing

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