DEVELOPMENT OF PLASMA ETCHING AND STRIPPING PROCESSES OF LOW-K DIELECTRICS FOR COPPER DAMASCENE METALLISATION

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Bibliographic Details
Main Author:	CHUA MAY LEE PAULINE
Other Authors:	SINGAPORE-MIT ALLIANCE
Format:	Theses and Dissertations
Published:	2019
Subjects:	CVD low-K dielectric OSG DOE Plasma etching Damascene
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/153904
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-153904
record_format	dspace
spelling	sg-nus-scholar.10635-1539042019-05-29T07:18:40Z DEVELOPMENT OF PLASMA ETCHING AND STRIPPING PROCESSES OF LOW-K DIELECTRICS FOR COPPER DAMASCENE METALLISATION CHUA MAY LEE PAULINE SINGAPORE-MIT ALLIANCE VLADIMIR BLIZNETSOV DU HEJUN CVD low-K dielectric OSG DOE Plasma etching Damascene Master's MASTER OF SCIENCE IN ADVANCED MATERIALS FOR MICRO- & NANO- SYSTEMS 2019-05-09T05:30:38Z 2019-05-09T05:30:38Z 2003 Thesis CHUA MAY LEE PAULINE (2003). DEVELOPMENT OF PLASMA ETCHING AND STRIPPING PROCESSES OF LOW-K DIELECTRICS FOR COPPER DAMASCENE METALLISATION. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/153904 SMA BATCHLOAD 20190422
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	CVD low-K dielectric OSG DOE Plasma etching Damascene
spellingShingle	CVD low-K dielectric OSG DOE Plasma etching Damascene CHUA MAY LEE PAULINE DEVELOPMENT OF PLASMA ETCHING AND STRIPPING PROCESSES OF LOW-K DIELECTRICS FOR COPPER DAMASCENE METALLISATION
description	Master's
author2	SINGAPORE-MIT ALLIANCE
author_facet	SINGAPORE-MIT ALLIANCE CHUA MAY LEE PAULINE
format	Theses and Dissertations
author	CHUA MAY LEE PAULINE
author_sort	CHUA MAY LEE PAULINE
title	DEVELOPMENT OF PLASMA ETCHING AND STRIPPING PROCESSES OF LOW-K DIELECTRICS FOR COPPER DAMASCENE METALLISATION
title_short	DEVELOPMENT OF PLASMA ETCHING AND STRIPPING PROCESSES OF LOW-K DIELECTRICS FOR COPPER DAMASCENE METALLISATION
title_full	DEVELOPMENT OF PLASMA ETCHING AND STRIPPING PROCESSES OF LOW-K DIELECTRICS FOR COPPER DAMASCENE METALLISATION
title_fullStr	DEVELOPMENT OF PLASMA ETCHING AND STRIPPING PROCESSES OF LOW-K DIELECTRICS FOR COPPER DAMASCENE METALLISATION
title_full_unstemmed	DEVELOPMENT OF PLASMA ETCHING AND STRIPPING PROCESSES OF LOW-K DIELECTRICS FOR COPPER DAMASCENE METALLISATION
title_sort	development of plasma etching and stripping processes of low-k dielectrics for copper damascene metallisation
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/153904
_version_	1681099313266032640

DEVELOPMENT OF PLASMA ETCHING AND STRIPPING PROCESSES OF LOW-K DIELECTRICS FOR COPPER DAMASCENE METALLISATION

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