DEVELOPMENT OF PLASMA ETCHING AND STRIPPING PROCESSES OF LOW-K DIELECTRICS FOR COPPER DAMASCENE METALLISATION

Master's

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Bibliographic Details
Main Author: CHUA MAY LEE PAULINE
Other Authors: SINGAPORE-MIT ALLIANCE
Format: Theses and Dissertations
Published: 2019
Subjects:
OSG
DOE
Online Access:https://scholarbank.nus.edu.sg/handle/10635/153904
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Institution: National University of Singapore

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