FIN FET SIDE WALL FORMATION, CHARACTERIZATION AND RELATED SIMULATION

Master's

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Bibliographic Details
Main Author:	LIU JIN
Other Authors:	SINGAPORE-MIT ALLIANCE
Format:	Theses and Dissertations
Published:	2019
Subjects:	Fin FET MOS Capacitor lateral etching TMA Tsuprem4TM and MediciTM C-V characteristics I-V characteristics Layout Design Interface Charge Oxide Charge Depletion Width
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/154034
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-154034
record_format	dspace
spelling	sg-nus-scholar.10635-1540342019-05-10T13:16:31Z FIN FET SIDE WALL FORMATION, CHARACTERIZATION AND RELATED SIMULATION LIU JIN SINGAPORE-MIT ALLIANCE WU PING JAGAR SINGH Fin FET MOS Capacitor lateral etching TMA Tsuprem4TM and MediciTM C-V characteristics I-V characteristics Layout Design Interface Charge Oxide Charge Depletion Width Master's MASTER OF SCIENCE IN ADVANCED MATERIALS FOR MICRO- & NANO- SYSTEMS 2019-05-10T07:27:51Z 2019-05-10T07:27:51Z 2003 Thesis LIU JIN (2003). FIN FET SIDE WALL FORMATION, CHARACTERIZATION AND RELATED SIMULATION. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/154034 SMA BATCHLOAD 20190422
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Fin FET MOS Capacitor lateral etching TMA Tsuprem4TM and MediciTM C-V characteristics I-V characteristics Layout Design Interface Charge Oxide Charge Depletion Width
spellingShingle	Fin FET MOS Capacitor lateral etching TMA Tsuprem4TM and MediciTM C-V characteristics I-V characteristics Layout Design Interface Charge Oxide Charge Depletion Width LIU JIN FIN FET SIDE WALL FORMATION, CHARACTERIZATION AND RELATED SIMULATION
description	Master's
author2	SINGAPORE-MIT ALLIANCE
author_facet	SINGAPORE-MIT ALLIANCE LIU JIN
format	Theses and Dissertations
author	LIU JIN
author_sort	LIU JIN
title	FIN FET SIDE WALL FORMATION, CHARACTERIZATION AND RELATED SIMULATION
title_short	FIN FET SIDE WALL FORMATION, CHARACTERIZATION AND RELATED SIMULATION
title_full	FIN FET SIDE WALL FORMATION, CHARACTERIZATION AND RELATED SIMULATION
title_fullStr	FIN FET SIDE WALL FORMATION, CHARACTERIZATION AND RELATED SIMULATION
title_full_unstemmed	FIN FET SIDE WALL FORMATION, CHARACTERIZATION AND RELATED SIMULATION
title_sort	fin fet side wall formation, characterization and related simulation
publishDate	2019
url	https://scholarbank.nus.edu.sg/handle/10635/154034
_version_	1681099328781811712

FIN FET SIDE WALL FORMATION, CHARACTERIZATION AND RELATED SIMULATION

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