$Study of strain relaxation in semiconductors by convergent beam electron diffraction$

Study of strain relaxation in semiconductors by convergent beam electron diffraction

Ph.D

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Bibliographic Details
Main Author:	TOH SUEY LI
Other Authors:	CHEMISTRY
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	convergent beam electron diffraction, uniaxial and biaxial strain, etch-stop layer, trench structures, silicidation, SiGe/Si heterostructures
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/15501
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-15501
record_format	dspace
spelling	sg-nus-scholar.10635-155012015-01-08T22:04:39Z Study of strain relaxation in semiconductors by convergent beam electron diffraction TOH SUEY LI CHEMISTRY LOH KIAN PING convergent beam electron diffraction, uniaxial and biaxial strain, etch-stop layer, trench structures, silicidation, SiGe/Si heterostructures Ph.D DOCTOR OF PHILOSOPHY 2010-04-08T10:54:14Z 2010-04-08T10:54:14Z 2006-10-23 Thesis TOH SUEY LI (2006-10-23). Study of strain relaxation in semiconductors by convergent beam electron diffraction. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/15501 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	convergent beam electron diffraction, uniaxial and biaxial strain, etch-stop layer, trench structures, silicidation, SiGe/Si heterostructures
spellingShingle	convergent beam electron diffraction, uniaxial and biaxial strain, etch-stop layer, trench structures, silicidation, SiGe/Si heterostructures TOH SUEY LI Study of strain relaxation in semiconductors by convergent beam electron diffraction
description	Ph.D
author2	CHEMISTRY
author_facet	CHEMISTRY TOH SUEY LI
format	Theses and Dissertations
author	TOH SUEY LI
author_sort	TOH SUEY LI
title	Study of strain relaxation in semiconductors by convergent beam electron diffraction
title_short	Study of strain relaxation in semiconductors by convergent beam electron diffraction
title_full	Study of strain relaxation in semiconductors by convergent beam electron diffraction
title_fullStr	Study of strain relaxation in semiconductors by convergent beam electron diffraction
title_full_unstemmed	Study of strain relaxation in semiconductors by convergent beam electron diffraction
title_sort	study of strain relaxation in semiconductors by convergent beam electron diffraction
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/15501
_version_	1681079205276680192

Study of strain relaxation in semiconductors by convergent beam electron diffraction

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