Strain Engineering for Enhanced P-channel Field Effect Transistor Performance

Master's

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Bibliographic Details
Main Author:	LIU FANGYUE
Other Authors:	NANOENGINEERING PROGRAMME
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Strain Engineering, p-channel transistor, SiGe S/D, Reverse embedded Si:C stressor, Sn Strain compenstation implant, Germanium Enrichment
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/15838
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-15838
record_format	dspace
spelling	sg-nus-scholar.10635-158382015-01-07T15:09:27Z Strain Engineering for Enhanced P-channel Field Effect Transistor Performance LIU FANGYUE NANOENGINEERING PROGRAMME YEO YEE CHIA Strain Engineering, p-channel transistor, SiGe S/D, Reverse embedded Si:C stressor, Sn Strain compenstation implant, Germanium Enrichment Master's MASTER OF ENGINEERING 2010-04-08T10:57:57Z 2010-04-08T10:57:57Z 2009-05-16 Thesis LIU FANGYUE (2009-05-16). Strain Engineering for Enhanced P-channel Field Effect Transistor Performance. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/15838 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Strain Engineering, p-channel transistor, SiGe S/D, Reverse embedded Si:C stressor, Sn Strain compenstation implant, Germanium Enrichment
spellingShingle	Strain Engineering, p-channel transistor, SiGe S/D, Reverse embedded Si:C stressor, Sn Strain compenstation implant, Germanium Enrichment LIU FANGYUE Strain Engineering for Enhanced P-channel Field Effect Transistor Performance
description	Master's
author2	NANOENGINEERING PROGRAMME
author_facet	NANOENGINEERING PROGRAMME LIU FANGYUE
format	Theses and Dissertations
author	LIU FANGYUE
author_sort	LIU FANGYUE
title	Strain Engineering for Enhanced P-channel Field Effect Transistor Performance
title_short	Strain Engineering for Enhanced P-channel Field Effect Transistor Performance
title_full	Strain Engineering for Enhanced P-channel Field Effect Transistor Performance
title_fullStr	Strain Engineering for Enhanced P-channel Field Effect Transistor Performance
title_full_unstemmed	Strain Engineering for Enhanced P-channel Field Effect Transistor Performance
title_sort	strain engineering for enhanced p-channel field effect transistor performance
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/15838
_version_	1681079261890347008

Strain Engineering for Enhanced P-channel Field Effect Transistor Performance

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