EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS
Master's
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2019
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/158747 |
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sg-nus-scholar.10635-1587472019-09-16T13:10:45Z EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS CHONG NYOK BOON DEPT OF ELECTRICAL & COMPUTER ENGG CHOI WEE KIONG TAN LENG SEOW Master's MASTER OF ENGINEERING 2019-09-16T02:37:07Z 2019-09-16T02:37:07Z 2001 Thesis CHONG NYOK BOON (2001). EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/158747 CCK BATCHLOAD 20190911 |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Master's |
| author2 |
DEPT OF ELECTRICAL & COMPUTER ENGG |
| author_facet |
DEPT OF ELECTRICAL & COMPUTER ENGG CHONG NYOK BOON |
| format |
Theses and Dissertations |
| author |
CHONG NYOK BOON |
| spellingShingle |
CHONG NYOK BOON EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| author_sort |
CHONG NYOK BOON |
| title |
EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_short |
EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_full |
EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_fullStr |
EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_full_unstemmed |
EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_sort |
effects of rf power and annealing on the properties of rf sputtered amorphous silicon carbide films |
| publishDate |
2019 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/158747 |
| _version_ |
1681099842709880832 |