EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS
Master's
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2019
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/158747 |
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sg-nus-scholar.10635-1587472024-10-26T00:50:56Z EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS CHONG NYOK BOON ELECTRICAL AND COMPUTER ENGINEERING CHOI WEE KIONG TAN LENG SEOW Master's MASTER OF ENGINEERING 2019-09-16T02:37:07Z 2019-09-16T02:37:07Z 2001 Thesis CHONG NYOK BOON (2001). EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/158747 CCK BATCHLOAD 20190911 |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Master's |
| author2 |
ELECTRICAL AND COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL AND COMPUTER ENGINEERING CHONG NYOK BOON |
| format |
Theses and Dissertations |
| author |
CHONG NYOK BOON |
| spellingShingle |
CHONG NYOK BOON EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| author_sort |
CHONG NYOK BOON |
| title |
EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_short |
EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_full |
EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_fullStr |
EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_full_unstemmed |
EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS |
| title_sort |
effects of rf power and annealing on the properties of rf sputtered amorphous silicon carbide films |
| publishDate |
2019 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/158747 |
| _version_ |
1821195194970669056 |