EFFECTS OF RF POWER AND ANNEALING ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON CARBIDE FILMS
Master's
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Main Author: | CHONG NYOK BOON |
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Other Authors: | DEPT OF ELECTRICAL & COMPUTER ENGG |
Format: | Theses and Dissertations |
Published: |
2019
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Online Access: | https://scholarbank.nus.edu.sg/handle/10635/158747 |
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Institution: | National University of Singapore |
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