Fabrication of high-aspect-ratio metallic micro-structures by reverse exposure method

Fabrication of high-aspect-ratio metallic micro-structures by reverse exposure method

Master's

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Bibliographic Details
Main Author: AMIR TAVAKKOLI KERMANI GHARIEHALI
Other Authors: MECHANICAL ENGINEERING
Format: Theses and Dissertations
Language:English
Published: 2010
Subjects:
Fabrication, High-aspect-ratio,Reverse Exposure,SU-8,Crack, Delamination
Online Access:http://scholarbank.nus.edu.sg/handle/10635/16482
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Institution: National University of Singapore
Language: English

Internet

http://scholarbank.nus.edu.sg/handle/10635/16482

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