Fabrication of high-aspect-ratio metallic micro-structures by reverse exposure method

Master's

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Bibliographic Details
Main Author:	AMIR TAVAKKOLI KERMANI GHARIEHALI
Other Authors:	MECHANICAL ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Fabrication, High-aspect-ratio,Reverse Exposure,SU-8,Crack, Delamination
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/16482
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-16482
record_format	dspace
spelling	sg-nus-scholar.10635-164822024-10-25T15:47:11Z Fabrication of high-aspect-ratio metallic micro-structures by reverse exposure method AMIR TAVAKKOLI KERMANI GHARIEHALI MECHANICAL ENGINEERING FUH YING HSI, JERRY WONG YOKE SAN Fabrication, High-aspect-ratio,Reverse Exposure,SU-8,Crack, Delamination Master's MASTER OF ENGINEERING 2010-04-08T11:05:26Z 2010-04-08T11:05:26Z 2009-03-25 Thesis AMIR TAVAKKOLI KERMANI GHARIEHALI (2009-03-25). Fabrication of high-aspect-ratio metallic micro-structures by reverse exposure method. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/16482 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	Fabrication, High-aspect-ratio,Reverse Exposure,SU-8,Crack, Delamination
spellingShingle	Fabrication, High-aspect-ratio,Reverse Exposure,SU-8,Crack, Delamination AMIR TAVAKKOLI KERMANI GHARIEHALI Fabrication of high-aspect-ratio metallic micro-structures by reverse exposure method
description	Master's
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING AMIR TAVAKKOLI KERMANI GHARIEHALI
format	Theses and Dissertations
author	AMIR TAVAKKOLI KERMANI GHARIEHALI
author_sort	AMIR TAVAKKOLI KERMANI GHARIEHALI
title	Fabrication of high-aspect-ratio metallic micro-structures by reverse exposure method
title_short	Fabrication of high-aspect-ratio metallic micro-structures by reverse exposure method
title_full	Fabrication of high-aspect-ratio metallic micro-structures by reverse exposure method
title_fullStr	Fabrication of high-aspect-ratio metallic micro-structures by reverse exposure method
title_full_unstemmed	Fabrication of high-aspect-ratio metallic micro-structures by reverse exposure method
title_sort	fabrication of high-aspect-ratio metallic micro-structures by reverse exposure method
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/16482
_version_	1821231204133765120

Fabrication of high-aspect-ratio metallic micro-structures by reverse exposure method

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