Fabrication of high-aspect-ratio metallic micro-structures by reverse exposure method

Master's

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Bibliographic Details
Main Author:	AMIR TAVAKKOLI KERMANI GHARIEHALI
Other Authors:	MECHANICAL ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Fabrication, High-aspect-ratio,Reverse Exposure,SU-8,Crack, Delamination
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/16482
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Institution:	National University of Singapore
Language:	English

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