Advanced source and drain contact engineering for multiple- gate transistors

Ph.D

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Bibliographic Details
Main Author:	LEE TEK PO RINUS
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	Silicide, FinFET, CMOS, Schottky Barrier, NiSi
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/17722
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-17722
record_format	dspace
spelling	sg-nus-scholar.10635-177222015-02-01T07:02:32Z Advanced source and drain contact engineering for multiple- gate transistors LEE TEK PO RINUS ELECTRICAL & COMPUTER ENGINEERING YEO YEE CHIA CHI DONGZHI Silicide, FinFET, CMOS, Schottky Barrier, NiSi Ph.D DOCTOR OF PHILOSOPHY 2010-07-15T18:01:35Z 2010-07-15T18:01:35Z 2009-08-18 Thesis LEE TEK PO RINUS (2009-08-18). Advanced source and drain contact engineering for multiple- gate transistors. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/17722 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Silicide, FinFET, CMOS, Schottky Barrier, NiSi
spellingShingle	Silicide, FinFET, CMOS, Schottky Barrier, NiSi LEE TEK PO RINUS Advanced source and drain contact engineering for multiple- gate transistors
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING LEE TEK PO RINUS
format	Theses and Dissertations
author	LEE TEK PO RINUS
author_sort	LEE TEK PO RINUS
title	Advanced source and drain contact engineering for multiple- gate transistors
title_short	Advanced source and drain contact engineering for multiple- gate transistors
title_full	Advanced source and drain contact engineering for multiple- gate transistors
title_fullStr	Advanced source and drain contact engineering for multiple- gate transistors
title_full_unstemmed	Advanced source and drain contact engineering for multiple- gate transistors
title_sort	advanced source and drain contact engineering for multiple- gate transistors
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/17722
_version_	1681079518264033280

Advanced source and drain contact engineering for multiple- gate transistors

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